A parametric study reveals more sustainable etch dynamics, chromium mask selectivity, and pathways toward zero-global-warming ...

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Oxford Instruments, a leading provider of advanced plasma processing solutions, today announced a plasma equipment supply ...

Oxford Instruments, a developer of plasma processing solutions, has announced a plasma equipment supply agreement with Applied Optoelectronics (AOI), a provider of advanced optical and hybrid ...

Whole-wafer FA approaches like our scia Mill series of ion beam etching platforms were designed to address the need for high-precision, repeatable and damage-free material removal for sample ...

Lam Research Corporation (NASDAQ:LRCX) is one of the best performing NASDAQ stocks according to hedge funds. On October 2, the company announced a breakthrough in etch technology. The technology is ...

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Abstract: We propose a method that enables real-time endpoint detection during plasma etching of small openings (the absolute area of the opening is at or below 5%) on a wafer. Traditional endpoint ...

Abstract: We propose a method that enables real-time endpoint detection during plasma etching of small openings (the absolute area of the opening is at or below 5 techniques rely on observing changes ...